Our Services
Products and Technologies
Key-Features
- Ion Beam Sputtering Deposition
- Tunable refractive index by genuine blending of two zone targets
- Up to six coating run for innovative designs
- Broad-Band optical monitoring system for high precision thickness control
- Iowes scatter values and defect densities
- lowest losses
- Load-Lock System
- Rugate-filter
Technologies
The IBS systems developed by CEC combine decades of experience in optical thin-film technology with the special requirements of our customers to continuously improve the quality of their coatings.
This combination results in customer-specific coating systems that offer everything from fully automated production processes for industrial series production to highly specialized functional coatings for research.
What all systems have in common is the use of our own CEC ion sources, including titanium extraction grid systems, as well as the possibility of applying gradual coating systems (so-called rugate filters) in an automated process controlled by a broadband optical monitoring system.
The so-called “sputter-up” process, in which the substrates rotate above the target, is also a common element of all NAVIGATOR IBS systems.
In addition, many features of the machines can be modularly adapted to the customer's specific requirements. This includes, for example, possible lock chambers for the substrates, movable secondary ion sources or even cooled or heated substrate carriers.
No matter what requirements you have for your IBS system, please contact us so that we can find the optimum solution together.
Materialmischungen und optisches Breitbandmonitoring
One of CEC's areas of expertise is the ability to coat oxide material mixtures of variable compositions. These are the prerequisite for the production of low-loss Rugate filters. With this innovative process variant, resistant coatings can be produced that achieve the highest quality among thin films. This process is therefore preferred for demanding laser applications.
Furthermore, CEC's coating systems feature broadband optical monitoring (BBOM). This ensures that the coatings have excellent characteristics with maximum flexibility.
Our Products
CEC's Navigator IBS is available in three different types:
- Navigator 1000 – Our standard system – diversily customizable configurations for your requirements.
- Navigator 1100 LL – The Load-Lock configuration is popular with industrial customers due to its increased productivity.
- Navigator 2500 – The IBS coating system for large-area substrates and even greater productivity.
Standard configurations:
Prepump (dry pumps), High Vacuum Pump (N₂) (Cryo Pump), Ion Source Type, Extraction Grid / Output, Assist Source Gases, Neutralization, Targets, Substrate Movement, Optical Monitoring, Mechanical Design, Electrical Design, Control System
Chamber Volume: 1000l
Uniform Coating Area: Ø 250 mm with uniformity better than +/- 0,5 %, no masks
Extraction Grid/Output: 3 extraction grids, 8cm diameter, up to 2 kV, 250 mA
Assist Plasma Source: RF-coupled (2 MHZ), filament free, up to 250 mA output
Options:
- Load-Lock System
- Multiple Monitoring Substrates
- Uniformity Masks
- Monitoring Extension
- Additional Metrology
- Substrate Heating
- Double Palettes: Ø 250 mm palettes increase the output
- Rugate-filter and gradient-index profiles capability
Application: R&D
Chamber Volume: 1100l
Uniform Coating Area: Ø 400 mm with uniformity better than +/- 0,5 %, no masks
Extraction Grid/Output: 3 extraction grids, 15cm diameter, up to 2 kV, 750 mA
Assist Plasma Source: RF-coupled (2 MHZ), filament free, up to 250 mA output
Options:
- Load-Lock System
- Multiple Monitoring Substrates
- Uniformity Masks
- Monitoring Extension
- Additional Metrology
- Substrate Heating
- Double Palettes: Ø 350 mm palettes increase the output
- Rugate-filter and gradient-index profiles capability
Application: Production
Chamber Volume: 2500l
Uniform Coating Area: Ø 600 mm with uniformity better than +/- 0,5 %, no masks
Extraction Grid/Output: 3 extraction grids, 15cm diameter, up to 2 kV, 900 mA
Assist Plasma Source: RF-coupled (2 MHZ), filament free, up to 300 V, 500 mA output
Options:
- Load-Lock System
- Multiple Monitoring Substrates
- Uniformity Masks
- Monitoring Extension
- Additional Metrology
- Substrate Heating
- Double Palettes: Ø 650 mm palettes increase the output
Application: R&D for large surfaces/ optics; for high production volumes