CEC konzentriert sich auf seine erfolgreiche Produktserie von IBS-Systemen - "NAVIGATOR IBS". Diese Serie zielt darauf ab, die höchstmögliche Qualität beim Beschichtungsprozess zu erzielen. Die Produkte dieser Serie reichen von kleinen manuell gesteuerten Beschichtungsanlagen für die Eigenforschung und - Entwicklung bis hin zu hochkomplexen Systemen mit automatischen Prozeduren für die industrielle Serienproduktion.

CEC's NAVIGATOR IBS gibt es in vier verschiedenen Typen:

NAVIGATOR 2100

NAVIGATOR 1100 Standard

NAVIGATOR 1100 Load-lock

NAVIGATOR IBS Customized

      Major Features:

• Tunable refractive index by genuine blending by using two zone targets, up to four coating materials in one coating run for innovative designs
• Production of complex filters with gradient-index profiles and Rugate-filters, extended recipe database software
• Highest performance ion source for ultimate uniform coating area
• Broad-Band optical monitoring system for high precision thickness control, complete integration into system control
• Higher throughput due to integration of load-lock system, low particle contamination , process chamber stays under stable conditions

NAVIGATOR 1100 ist CECs Standardsystem für IBS-Anlagen, das über eine D400mm Substratpalette in der Beschichtungskammer verfügt. Es ist ausgerüstet mit einem 3-Gitter RF-Ionenquellensystem, Zonentargets für Mischbeschichtungen, einem Hochvakuum-System, einem Kühlwassersystem, einem Schaltschrank und vielem mehr. Die weiteren NAVIGATOR 1100 Systeme bestehen aus diesem Standardsystem mit zusätzlichen Erweiterungen.

Standard Configuration            NAVIGATOR 1100
Chamber volume                           1100 l

Prepump (dry pumps)                   70 m³/h

High Vac. Pump (N2)                    10000 l/s (Process chamber)

Ion Source Type                             RF-coupled (2 MHz), filament free, inert gases and O2 capable

Extraction Grid / Output                 3 grids, 15 cm diameter, up to 2 kV, 750mA

Assist Plasma Source                  RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output

Assist Source Gases                    Inert gases and O2 capable

Neutralization                                 RF neutralizers, up to 1000 mA electron current

Targets                                            4 Materials (metal/oxide) forming two zone targets

Substrate Palettes                         Ø 450mm Plates

Uniform Coating Area                   Ø 400 mm with uniformity better 1%, no masks

Substrate Movement                     Single rotation system, up to 120 rpm

Optical Monitoring                         Broad-Band VIS/NIR spectrometer, fully integrated design

Mechanical Design                       Chamber door and control panel can be located in clean room

Electrical Design                           Peripheral I/O-terminals, integrated bus system

Control System                              PC/PLC control with HMI systems on touch panel display

 

System Options                           NAVIGATOR 1100

Optical Mon. DUV Upgrade          Additional DUV spectrometer, fully integrated design

Optical Mon. IR Upgrade               Additional IR spectrometer, fully integrated design

Uniformity with Mask                     0.1% uniformity with masks upgradeable

Thickness Monitoring                    Quartz crystal monitoring system optional

Two Substrate Palette                   „PUKI“ system with two Ø350mm Plates

Monitor Glasses Changer             Chip-changer up to six test substrates for the extreme thick filters

 

NAVIGATOR 1100 Load-Lock ist der Star unter den NAVIGATOR 1100 Systemen und beliebt bei Industriefirmen. Mit dem Load-Lock Transfersystem können mehrere Beschichtungsserien hintereinander  gefertigt werden ohne das Belüften der Beschichtungskammer. Dadurch wird eine Menge Zeit und Kosten gespart, was die Produktivität zusätzlich erhöht.

Standard Configuration            NAVIGATOR 1100LL
Chamber volume                           1100 l

Prepump (dry pumps)                   70 m³/h

High Vac. Pump (N2)                    10000 l/s (Process chamber), 13000 l/s (Load-lock chamber)

Ion Source Type                             RF-coupled (2 MHz), filament free, inert gases and O2 capable

Extraction Grid / Output                 3 grids, 15 cm diameter, up to 2 kV, 750mA

Assist Plasma Source                  RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output

Assist Source Gases                    Inert gases and O2 capable

Neutralization                                 RF neutralizers, up to 1000 mA electron current

Targets                                            4 Materials (metal/oxide) forming two zone targets

Substrate Palettes                         Ø 350mm substrates

Uniform Coating Area                   Ø 350 mm with uniformity better 1%, no masks

Substrate Movement                     Single rotation system, up to 120 rpm

Optical Monitoring                         Broad-Band VIS/NIR spectrometer, fully integrated design

Mechanical Design                       Chamber door and control panel can be located in clean room

Electrical Design                           Peripheral I/O-terminals, integrated bus system

Control System                              PC/PLC control with HMI systems on touch panel display

 

System Options                           NAVIGATOR 1100LL

Optical Mon. DUV Upgrade          Additional DUV spectrometer, fully integrated design

Optical Mon. IR Upgrade               Additional IR spectrometer, fully integrated design

Uniformity with Mask                     0.1% uniformity with masks upgradeable

Thickness Monitoring                    Quartz crystal monitoring system optional

Monitor Glasses Changer             Chip-changer up to six test substrates for the extreme thick filters

 

NAVIGATOR 2100 ist das next-generation IBS-Beschichtungssystem. Sein besonderes Merkmal sind die zwei D600mm Substratpaletten, von denen jeder Substrathalter Substrate tragen kann, die mehr als 100 kg wiegen. Dies macht das Beschichten von großflächigen Substraten möglich und vergrößert die  Produktivität um ein Vielfaches.

Standard Configuration            NAVIGATOR 2100
Chamber volume                           2100 l

Prepump (dry pumps)                   70 m³/h

High Vac. Pump (N2)                    10000 l/s

Ion Source Type                             RF-coupled (2 MHz), filament free, inert gases and O2 capable

Extraction Grid / Output                 3 grids, 15 cm diameter, up to 2 kV, 750mA

Assist Plasma Source                  RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output

Assist Source Gases                    Inert gases and O2 capable

Neutralization                                 RF neutralizers, up to 1000 mA electron current

Targets                                            4 Materials (metal/oxide) forming two zone targets

Substrate Palettes                         2 x Ø 620mm substrates

Uniform Coating Area                   Ø 600 mm with uniformity better 1%, no masks

Substrate Movement                     Single rotation system, up to 120 rpm

Optical Monitoring                         Broad-Band VIS/NIR spectrometer, fully integrated design

Mechanical Design                       Chamber door and control panel can be located in clean room

Electrical Design                           Peripheral I/O-terminals, integrated bus system

Control System                              PC/PLC control with HMI systems on touch panel display

 

System Options                           NAVIGATOR 2100

Optical Mon. DUV Upgrade          Additional DUV spectrometer, fully integrated design

Optical Mon. IR Upgrade               Additional IR spectrometer, fully integrated design

Uniformity with Mask                     0.1% uniformity with masks upgradeable

Thickness Monitoring                    Quartz crystal monitoring system optional

Heavy Substrate Upgrade            Heavy load substrate holders ( >200kg capacity each)