Cutting Edge Coatings GmbH focuses on its main product series of ion beam sputtering coatings system - NAVIGATOR IBS DEPOSITION SYSTEMS, which aim at the implementation of coating processes with the highest achievable quality. The products of the series range from small manually controlled coating plants for in-house research and development purposes up to highly complex systems with automated coating procedures for industrial serial production.

CEC's IBS DEPOSITION SYSTEMS come in different types:

NAVIGATOR 2100 - for substrates with a diameter up to 620 mm

NAVIGATOR 1100 Standard - for substrates with a diameter up to 620 mm

NAVIGATOR 1100 Load-lock

NAVIGATOR IBS Customized

      Major Features:

• Tunable refractive index by genuine blending under usage of two zone targets, up to four coating materials in one coating run for innovative designs
• Production of complex filters with gradient-index profiles and Rugate filters, extended recipe database software
• High performance ion source for uniform coating area
• Broad-Band optical monitoring system for high precision in situ thickness control, complete integration into system control
• Higher throughput due to integration of load-lock system, lower particle contamination, process chamber stays under stable conditions

NAVIGATOR 1100 is the standard IBS coating system built by CEC. With this machine, it is possible to apply a uniform coating on a substrate holder with up to 400 mm in diameter. It is equipped with a 3 grid RF ion source system, zone targets enabling mixture coatings, a high-vacuum pump system, a cooling water system, an electric cabinet and so on. Other Navigator IBS systems are based on this coating system.

Standard Configuration            NAVIGATOR 1100
Chamber volume                           1100 l

Prepump (dry pumps)                   70 m³/h

High Vac. Pump (N2)                    10000 l/s (Process chamber)

Ion Source Type                             RF-coupled (2 MHz), filament free, inert gases and O2 capable

Extraction Grid / Output                 3 grids, 15 cm diameter, up to 2 kV, 750mA

Assist Plasma Source                  RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output

Assist Source Gases                    Inert gases and O2 capable

Neutralization                                 RF neutralizers, up to 1000 mA electron current

Targets                                            4 Materials (metal/oxide) forming two zone targets

Substrate Palettes                         Ø 450mm Plates

Uniform Coating Area                   Ø 400 mm with uniformity better 1%, no masks

Substrate Movement                     Single rotation system, up to 120 rpm

Optical Monitoring                         Broad-Band VIS/NIR spectrometer, fully integrated design

Mechanical Design                       Chamber door and control panel can be located in clean room

Electrical Design                           Peripheral I/O-terminals, integrated bus system

Control System                              PC/PLC control with HMI systems on touch panel display

 

System Options                           NAVIGATOR 1100

Optical Mon. DUV Upgrade          Additional DUV spectrometer, fully integrated design

Optical Mon. IR Upgrade               Additional IR spectrometer, fully integrated design

Uniformity with Mask                     0.1% uniformity with masks upgradeable

Thickness Monitoring                    Quartz crystal monitoring system optional

Two Substrate Palette                   „PUKI“ system with two Ø350mm Plates

Monitor Glasses Changer             Chip-changer up to six test substrates for the extreme thick filters

 

NAVIGATOR 1100 Load-Lock is the star product and popular for industrial companies. With the Load-Lock Transfer System  multiple coating runs can be done without opening the chamber door. This can save a lot of time and cost, increasing the productivity.

Standard Configuration            NAVIGATOR 1100LL
Chamber volume                           1100 l

Prepump (dry pumps)                   70 m³/h

High Vac. Pump (N2)                    10000 l/s (Process chamber), 13000 l/s (Load-lock chamber)

Ion Source Type                             RF-coupled (2 MHz), filament free, inert gases and O2 capable

Extraction Grid / Output                 3 grids, 15 cm diameter, up to 2 kV, 750mA

Assist Plasma Source                  RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output

Assist Source Gases                    Inert gases and O2 capable

Neutralization                                 RF neutralizers, up to 1000 mA electron current

Targets                                            4 Materials (metal/oxide) forming two zone targets

Substrate Palettes                         Ø 350mm substrates

Uniform Coating Area                   Ø 350 mm with uniformity better 1%, no masks

Substrate Movement                     Single rotation system, up to 120 rpm

Optical Monitoring                         Broad-Band VIS/NIR spectrometer, fully integrated design

Mechanical Design                       Chamber door and control panel can be located in clean room

Electrical Design                           Peripheral I/O-terminals, integrated bus system

Control System                              PC/PLC control with HMI systems on touch panel display

 

System Options                           NAVIGATOR 1100LL

Optical Mon. DUV Upgrade          Additional DUV spectrometer, fully integrated design

Optical Mon. IR Upgrade               Additional IR spectrometer, fully integrated design

Uniformity with Mask                     0.1% uniformity with masks upgradeable

Thickness Monitoring                    Quartz crystal monitoring system optional

Monitor Glasses Changer             Chip-changer up to six test substrates for the extreme thick filters

 

NAVIGATOR 2100 is the next generation IBS coating system. Its special feature are the two substrate pallets with a diameter of 620 mm each. Both pallet holders are able to bear substrates weighing more than 100 kg. This turns the coating of substrates with large diameters into reality and hugely improves the productivity.

Standard Configuration            NAVIGATOR 2100
Chamber volume                           2100 l

Prepump (dry pumps)                   70 m³/h

High Vac. Pump (N2)                    10000 l/s

Ion Source Type                             RF-coupled (2 MHz), filament free, inert gases and O2 capable

Extraction Grid / Output                 3 grids, 15 cm diameter, up to 2 kV, 750mA

Assist Plasma Source                  RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output

Assist Source Gases                    Inert gases and O2 capable

Neutralization                                 RF neutralizers, up to 1000 mA electron current

Targets                                            4 Materials (metal/oxide) forming two zone targets

Substrate Palettes                         2 x Ø 620mm substrates

Uniform Coating Area                   Ø 600 mm with uniformity better 1%, no masks

Substrate Movement                     Single rotation system, up to 120 rpm

Optical Monitoring                         Broad-Band VIS/NIR spectrometer, fully integrated design

Mechanical Design                       Chamber door and control panel can be located in clean room

Electrical Design                           Peripheral I/O-terminals, integrated bus system

Control System                              PC/PLC control with HMI systems on touch panel display

 

System Options                           NAVIGATOR 2100

Optical Mon. DUV Upgrade          Additional DUV spectrometer, fully integrated design

Optical Mon. IR Upgrade               Additional IR spectrometer, fully integrated design

Uniformity with Mask                     0.1% uniformity with masks upgradeable

Thickness Monitoring                    Quartz crystal monitoring system optional

Heavy Substrate Upgrade            Heavy load substrate holders ( >200kg capacity each)