Cutting Edge Coatings GmbH focuses on its main product series of ion beam sputtering coatings system - NAVIGATOR IBS DEPOSITION SYSTEMS, which aim at the implementation of coating processes with the highest achievable quality. The products of the series range from small manually controlled coating plants for in-house research & development purposes up to highly complex systems with automated coating procedures for industrial serial production.
CEC's IBS DEPOSITION SYSTEMS come in four different types:
NAVIGATOR 2100
NAVIGATOR 1100 Standard
NAVIGATOR 1100 Load-lock
NAVIGATOR IBS Customized
Major Features:
- Tunable refractive index by genuine blending by using two zone targets, up to four coating materials in one coating run for innovative designs
- Production of complex filters with gradient-index profiles and Rugate-filters, extended recipe database software
- Highest performance ion source for ultimate uniform coating area
- Broad-Band optical monitoring system for high precision thickness control, complete integration into system control
- Higher throughput due to integration of load-lock system, low particle contamination , process chamber stays under stable conditions
NAVIGATOR 1100 Standard is the standard IBS coating system of CEC, which comes with One D400mm pallet in the coating chamber. It is equipped with a 3 grid RF ion source system, zone targets enabling mixture coatings, a high-vacuum pump system, a cooling water system, an electric cabinet and so on. Other Navigator IBS systems are upgraded based on this classical type.
Standard Configuration NAVIGATOR 1100
Chamber volume 1100 l
Prepump (dry pumps) 70 m³/h
High Vac. Pump (N2) 10000 l/s (Process chamber)
Ion Source Type RF-coupled (2 MHz), filament free, inert gases and O2 capable
Extraction Grid / Output 3 grids, 15 cm diameter, up to 2 kV, 750mA
Assist Plasma Source RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output
Assist Source Gases Inert gases and O2 capable
Neutralization RF neutralizers, up to 1000 mA electron current
Targets 4 Materials (metal/oxide) forming two zone targets
Substrate Palettes Ø 450mm Plates
Uniform Coating Area Ø 400 mm with uniformity better 1%, no masks
Substrate Movement Single rotation system, up to 120 rpm
Optical Monitoring Broad-Band VIS/NIR spectrometer, fully integrated design
Mechanical Design Chamber door and control panel can be located in clean room
Electrical Design Peripheral I/O-terminals, integrated bus system
Control System PC/PLC control with HMI systems on touch panel display
System Options NAVIGATOR 1100
Optical Mon. DUV Upgrade Additional DUV spectrometer, fully integrated design
Optical Mon. IR Upgrade Additional IR spectrometer, fully integrated design
Uniformity with Mask 0.1% uniformity with masks upgradeable
Thickness Monitoring Quartz crystal monitoring system optional
Two Substrate Palette „PUKI“ system with two Ø350mm Plates
Monitor Glasses Changer Chip-changer up to six test substrates for the extreme thick filters
NAVIGATOR 1100 Load-Lock is the superstar product and popular with industrial companies With the Load-Lock Transfer System one can continuously to do multiple coating runs without opening the chamber door, which saves a lot of time and cost and further increases productivity.
Standard Configuration NAVIGATOR 1100LL
Chamber volume 1100 l
Prepump (dry pumps) 70 m³/h
High Vac. Pump (N2) 10000 l/s (Process chamber), 13000 l/s (Load-lock chamber)
Ion Source Type RF-coupled (2 MHz), filament free, inert gases and O2 capable
Extraction Grid / Output 3 grids, 15 cm diameter, up to 2 kV, 750mA
Assist Plasma Source RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output
Assist Source Gases Inert gases and O2 capable
Neutralization RF neutralizers, up to 1000 mA electron current
Targets 4 Materials (metal/oxide) forming two zone targets
Substrate Palettes Ø 350mm substrates
Uniform Coating Area Ø 350 mm with uniformity better 1%, no masks
Substrate Movement Single rotation system, up to 120 rpm
Optical Monitoring Broad-Band VIS/NIR spectrometer, fully integrated design
Mechanical Design Chamber door and control panel can be located in clean room
Electrical Design Peripheral I/O-terminals, integrated bus system
Control System PC/PLC control with HMI systems on touch panel display
System Options NAVIGATOR 1100LL
Optical Mon. DUV Upgrade Additional DUV spectrometer, fully integrated design
Optical Mon. IR Upgrade Additional IR spectrometer, fully integrated design
Uniformity with Mask 0.1% uniformity with masks upgradeable
Thickness Monitoring Quartz crystal monitoring system optional
Monitor Glasses Changer Chip-changer up to six test substrates for the extreme thick filters
NAVIGATOR 2100 is the next generation IBS coating system. Its special feature is that it comes equipped with Two D600mm substrate pallets with each pallet holder being able to bear substrates weighing more than 100 kg. This turns the coating of substrates with large diameters into reality and hugely improves the productivity.
Standard Configuration NAVIGATOR 2100
Chamber volume 2100 l
Prepump (dry pumps) 70 m³/h
High Vac. Pump (N2) 10000 l/s
Ion Source Type RF-coupled (2 MHz), filament free, inert gases and O2 capable
Extraction Grid / Output 3 grids, 15 cm diameter, up to 2 kV, 750mA
Assist Plasma Source RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output
Assist Source Gases Inert gases and O2 capable
Neutralization RF neutralizers, up to 1000 mA electron current
Targets 4 Materials (metal/oxide) forming two zone targets
Substrate Palettes 2 x Ø 620mm substrates
Uniform Coating Area Ø 600 mm with uniformity better 1%, no masks
Substrate Movement Single rotation system, up to 120 rpm
Optical Monitoring Broad-Band VIS/NIR spectrometer, fully integrated design
Mechanical Design Chamber door and control panel can be located in clean room
Electrical Design Peripheral I/O-terminals, integrated bus system
Control System PC/PLC control with HMI systems on touch panel display
System Options NAVIGATOR 2100
Optical Mon. DUV Upgrade Additional DUV spectrometer, fully integrated design
Optical Mon. IR Upgrade Additional IR spectrometer, fully integrated design
Uniformity with Mask 0.1% uniformity with masks upgradeable
Thickness Monitoring Quartz crystal monitoring system optional
Heavy Substrate Upgrade Heavy load substrate holders ( >200kg capacity each)
NAVIGATOR 1100 is the standard IBS coating system of CEC, which comes with One D450mm plate in the coating chamber. It is equipped with a 3 grid RF ion source system, zone targets enabling mixture coatings, a high-vacuum pump system, a cooling water system, an electric cabinet and so on. Other Navigator IBS systems are upgraded based on this classical type. We can customize our products according to your needs. For Example:
- Chamber Volume
- Special Flange Interface
- Multiple Neutralizers
- Movable Assist Ion Sources
- Dual Substrate Plates
- Substrate Heating and Cooling
- Double Load-Lock Park Lift
- and so on...
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Hollerithallee 18, 30419 Hannover, Germany
Tel: +49 511 4759300
E-mail: info@cutting-edge-coatings.com