ion beam sputtering deposition system, ion beam sputter coating machine,
Cutting Edge Coatings GmbH focuses on its main product series of ion beam sputtering coatings system - NAVIGATOR IBS DEPOSITION SYSTEMS, which aim at the implementation of coating processes with the highest achievable quality. The products of the series range from small manually controlled coating plants for in-house research and development purposes up to highly complex systems with automated coating procedures for industrial serial production.
CEC's IBS DEPOSITION SYSTEMS come in different types:
NAVIGATOR 2100 - for substrates with a diameter up to 620 mm
NAVIGATOR 1100 Standard - for substrates with a diameter up to 620 mm
NAVIGATOR 1100 Load-lock
NAVIGATOR IBS Customized
Major Features:
NAVIGATOR 1100 is the standard IBS coating system built by CEC. With this machine, it is possible to apply a uniform coating on a substrate holder with up to 400 mm in diameter. It is equipped with a 3 grid RF ion source system, zone targets enabling mixture coatings, a high-vacuum pump system, a cooling water system, an electric cabinet and so on. Other Navigator IBS systems are based on this coating system.
Standard Configuration NAVIGATOR 1100
Chamber volume 1100 l
Prepump (dry pumps) 70 m³/h
High Vac. Pump (N2) 10000 l/s (Process chamber)
Ion Source Type RF-coupled (2 MHz), filament free, inert gases and O2 capable
Extraction Grid / Output 3 grids, 15 cm diameter, up to 2 kV, 750mA
Assist Plasma Source RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output
Assist Source Gases Inert gases and O2 capable
Neutralization RF neutralizers, up to 1000 mA electron current
Targets 4 Materials (metal/oxide) forming two zone targets
Substrate Palettes Ø 450mm Plates
Uniform Coating Area Ø 400 mm with uniformity better 1%, no masks
Substrate Movement Single rotation system, up to 120 rpm
Optical Monitoring Broad-Band VIS/NIR spectrometer, fully integrated design
Mechanical Design Chamber door and control panel can be located in clean room
Electrical Design Peripheral I/O-terminals, integrated bus system
Control System PC/PLC control with HMI systems on touch panel display
System Options NAVIGATOR 1100
Optical Mon. DUV Upgrade Additional DUV spectrometer, fully integrated design
Optical Mon. IR Upgrade Additional IR spectrometer, fully integrated design
Uniformity with Mask 0.1% uniformity with masks upgradeable
Thickness Monitoring Quartz crystal monitoring system optional
Two Substrate Palette „PUKI“ system with two Ø350mm Plates
Monitor Glasses Changer Chip-changer up to six test substrates for the extreme thick filters
NAVIGATOR 1100 Load-Lock is the star product and popular for industrial companies. With the Load-Lock Transfer System multiple coating runs can be done without opening the chamber door. This can save a lot of time and cost, increasing the productivity.
Standard Configuration NAVIGATOR 1100LL
Chamber volume 1100 l
Prepump (dry pumps) 70 m³/h
High Vac. Pump (N2) 10000 l/s (Process chamber), 13000 l/s (Load-lock chamber)
Ion Source Type RF-coupled (2 MHz), filament free, inert gases and O2 capable
Extraction Grid / Output 3 grids, 15 cm diameter, up to 2 kV, 750mA
Assist Plasma Source RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output
Assist Source Gases Inert gases and O2 capable
Neutralization RF neutralizers, up to 1000 mA electron current
Targets 4 Materials (metal/oxide) forming two zone targets
Substrate Palettes Ø 350mm substrates
Uniform Coating Area Ø 350 mm with uniformity better 1%, no masks
Substrate Movement Single rotation system, up to 120 rpm
Optical Monitoring Broad-Band VIS/NIR spectrometer, fully integrated design
Mechanical Design Chamber door and control panel can be located in clean room
Electrical Design Peripheral I/O-terminals, integrated bus system
Control System PC/PLC control with HMI systems on touch panel display
System Options NAVIGATOR 1100LL
Optical Mon. DUV Upgrade Additional DUV spectrometer, fully integrated design
Optical Mon. IR Upgrade Additional IR spectrometer, fully integrated design
Uniformity with Mask 0.1% uniformity with masks upgradeable
Thickness Monitoring Quartz crystal monitoring system optional
Monitor Glasses Changer Chip-changer up to six test substrates for the extreme thick filters
NAVIGATOR 2100 is the next generation IBS coating system. Its special feature are the two substrate pallets with a diameter of 620 mm each. Both pallet holders are able to bear substrates weighing more than 100 kg. This turns the coating of substrates with large diameters into reality and hugely improves the productivity.
Standard Configuration NAVIGATOR 2100
Chamber volume 2100 l
Prepump (dry pumps) 70 m³/h
High Vac. Pump (N2) 10000 l/s
Ion Source Type RF-coupled (2 MHz), filament free, inert gases and O2 capable
Extraction Grid / Output 3 grids, 15 cm diameter, up to 2 kV, 750mA
Assist Plasma Source RF-coupled (2 MHz) sources, filament free, up to 300V, 500mA output
Assist Source Gases Inert gases and O2 capable
Neutralization RF neutralizers, up to 1000 mA electron current
Targets 4 Materials (metal/oxide) forming two zone targets
Substrate Palettes 2 x Ø 620mm substrates
Uniform Coating Area Ø 600 mm with uniformity better 1%, no masks
Substrate Movement Single rotation system, up to 120 rpm
Optical Monitoring Broad-Band VIS/NIR spectrometer, fully integrated design
Mechanical Design Chamber door and control panel can be located in clean room
Electrical Design Peripheral I/O-terminals, integrated bus system
Control System PC/PLC control with HMI systems on touch panel display
System Options NAVIGATOR 2100
Optical Mon. DUV Upgrade Additional DUV spectrometer, fully integrated design
Optical Mon. IR Upgrade Additional IR spectrometer, fully integrated design
Uniformity with Mask 0.1% uniformity with masks upgradeable
Thickness Monitoring Quartz crystal monitoring system optional
Heavy Substrate Upgrade Heavy load substrate holders ( >200kg capacity each)
NAVIGATOR 1100 Customized is a system that is specially tailored to the respective customer. Here, individual components of our standard Navigator 1100 or Navigator 2100 machines can be exchanged or added. For example, the substrate holder for a substrate plate with a diameter of 400 mm can be replaced by a holder that can hold two substrate plates with a diameter of 350 mm each (PUKI system). Uniformity masks and a substrate heater can also be integrated. Other special requests can be discussed on an individual basis, such as:
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Tel: +49 511 4759300
E-mail: info@cutting-edge-coatings.com